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Standard PE-CVD
Introduction
Plasma Type: Direct Plasma
Power Source: RF 600W (13.56 MHz)
Substrate Size:
~ 6 Inch
Substrate Temperature:Max 500℃ (연속 사용 기준)
 System Control:
PLC + Touch (Manual)
 Option :Full Auto Control by Recipe, Data 
                Logging (PLC + PC): High Vacuum Unit  
CVD工艺参数

The Word Best Plasma
Contact: Mr. Yu, Mr. Tang
Tel:13612999216 13632910173
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